NO.1

FEI FIB 200:

--Magnum column: 5-30kV

--Milling power: 21nA beam current

--CDEM for ions and electron images with 7nm resolution

--Windows NT and FEI UI XP 2.25;

--5-axis, comp-eucentric tilt stage

--Full coverage of 200mm diameter

--Gas Injection System: Max 4 injectors, 0 included; chemistry of choice

--Vacuum system: column IGP, air cooled turbo and mechanical PVP