The Inficon 850 series cold cathode gauge was used in a broad variety of vacuum systems beginning approximately 1990. This item is new and works great as a replacement for the original CCG in your vintage SEM, FIB and similar tools including the FEI FIB200, FIB800, DB8XX well as the XL-series of SEMs.

SPECIFICATIONS

Measuring Range 1x10-7 to 1x10-2 torr

Vacuum Connection KF-25

Materials exposed to vacuum Stainless steel, graphite, ceramic, pyrex

HV supply requirements 3kV @ 1mA max on start-up 2kV @ 1mA max after start-up

Max overpressure 15 PSIG

Volume of tube 25cc

Max operating temp 50C

Max bakeout temp With magnet removed: 350C

Infinicon part #850-610-G2